Piezoelectric P(VDF-TrFE) film inkjet printed on silicon for high-frequency ultrasound applications
In: Journal of Applied Physics, Jg. 129 (2021-05-21), S. 195107-195107
Online
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Zugriff:
We investigated the innovative processing of poly(vinylidene fluoride-trifluoroethylene) P(VDFx-TrFE1-x) (x = 83 mol. %) by inkjet printing to deliver uniform and thickness-controlled layers on silicon substrates. Here, we provide detailed processing steps and optimize film deposition conditions. The thickness coupling factor for a P(VDF-TrFE) film around 11 μm thick was 22%, demonstrating good electromechanical performance after poling. These multilayer structures were specifically for high-frequency, single-element ultrasonic transducer applications. The measurements of electro-acoustic responses were in water. The maximal frequency was centered at 33.2 MHz and had a fine axial resolution at 22 μm, corresponding to a fractional bandwidth at −6 dB of 100%. In the context of technological evolutions aimed at miniaturized devices and integrated electronics, these results allow for the consideration of complex structures such as multi-element transducers for high-frequency imaging applications.
| Titel: |
Piezoelectric P(VDF-TrFE) film inkjet printed on silicon for high-frequency ultrasound applications
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| Autor/in / Beteiligte Person: | Gregoire, Jean-Marc ; Levassort, Franck ; Callé, Samuel ; Banquart, Aline ; Ossant, Frédéric ; Sean Toffessi Siewe ; Chevalliot, Stéphanie ; Capri, Arnaud ; Fritsch, Lionel ; Imagerie et cerveau (iBrain - Inserm U1253 - UNIV Tours ) ; Université de Tours-Institut National de la Santé et de la Recherche Médicale (INSERM) ; GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN - UMR 7347) ; Université de Tours-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL) ; Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS) ; Université de Tours (UT)-Institut National de la Santé et de la Recherche Médicale (INSERM) ; Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL) ; Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université de Tours (UT)-Centre National de la Recherche Scientifique (CNRS) |
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| Zeitschrift: | Journal of Applied Physics, Jg. 129 (2021-05-21), S. 195107-195107 |
| Veröffentlichung: | AIP Publishing, 2021 |
| Medientyp: | unknown |
| ISSN: | 1089-7550 (print) ; 0021-8979 (print) |
| DOI: | 10.1063/5.0048444 |
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