High quality graphene synthesized by atmospheric pressure CVD on copper foil
In: Surface and Coatings Technology, Jg. 230 (2013-09-01), S. 87-92
Online
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Zugriff:
International audience; Graphene was synthesized at 1000 °C by Atmospheric Pressure Chemical Vapor Deposition on copper foil from methane diluted in argon and hydrogen. The influence of the main synthesis parameters was studied on 2 × 2 cm2 foils in order to obtain continuous monolayer graphenewithout crystalline defect. The uniformity, crystal quality and number of layers of graphenewere analyzed by Raman spectroscopy and Scanning Electronic Microscopy. First, an increase of the annealing pre-treatment duration induced an increase of the average size of copper grains, leading to larger graphene flakes of higher crystallinity presenting a lower number of layers. Similar evolutions of graphene characteristics were observed when decreasing the methane concentration to 20 ppm, whereas an increase of run duration led to a loss of graphene quality and to a higher number of graphene layers, confirming that graphene formation is not self-limiting on copper. An optimum hydrogen/methane ratio was found, quite different from other results of the literature, probably due to differences in the copper pre-treatment step. Finally, an optimized three step processwas developed to formmonolayer continuous graphene of high quality, successfully transposed to 7 × 7 cm2 substrates after a reactor scale-up.
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High quality graphene synthesized by atmospheric pressure CVD on copper foil
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Autor/in / Beteiligte Person: | Rabot, Caroline ; Zenasni, Aziz ; Caussat, Brigitte ; Vergnes, Hugues ; Trinsoutrot, Pierre ; Delamoreanu, Alexandru ; Laboratoire de génie chimique [ancien site de Basso-Cambo] (LGC) ; Université Toulouse III - Paul Sabatier (UT3) ; Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP) ; Université Fédérale Toulouse Midi-Pyrénées ; Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI) ; Direction de Recherche Technologique (CEA) (DRT (CEA)) ; Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA) ; Laboratoire des technologies de la microélectronique (LTM) ; Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS) ; Laboratoire de Génie Chimique (LGC) ; Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP) ; Université de Toulouse (UT) ; Commissariat à l'Energie Atomique et aux énergies alternatives - CEA (FRANCE) ; Centre National de la Recherche Scientifique - CNRS (FRANCE) ; Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE) ; (FRANCE), MINATEC ; Université Toulouse III - Paul Sabatier - UT3 (FRANCE) ; Ecole Polytechnique (FRANCE) ; Université Joseph Fourier Grenoble 1 - UJF (FRANCE) ; Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
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Zeitschrift: | Surface and Coatings Technology, Jg. 230 (2013-09-01), S. 87-92 |
Veröffentlichung: | Elsevier BV, 2013 |
Medientyp: | unknown |
ISSN: | 0257-8972 (print) ; 1879-3347 (print) |
DOI: | 10.1016/j.surfcoat.2013.06.050 |
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