Surface and bulk characterizations of CNx thin films made by r.f. magnetron sputtering
In: Surface and Coatings Technology Surface and Coatings Technology, Elsevier, 2002, 151-152, pp.184-188. ⟨10.1016/S0257-8972(01)01574-2⟩; (2002-03-01)
Online
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Zugriff:
Carbon nitride thin films deposited by reactive RF magnetron sputtering were studied to obtain knowledge for various applications. Different types of analyses were performed on CN x layers to determine both surface and bulk properties of the films and particular attention was paid to nitrogen incorporation in the films. The variation in composition and type of chemical bonds between atoms in the films was followed using X-ray photoelectron spectroscopy (XPS). The results showed that the N/C ratio reaches 0.7. The wettability tests can lead to the determination of superficial energy, providing very interesting information about biocompatibility. The wettability and superficial energy decreased with nitrogen content. The evolution of the elastic properties of the CN x layers as a function of the nitrogen incorporation was investigated by Brillouin spectroscopy. The measured Rayleigh wave velocity decreased with nitrogen incorporation.
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Surface and bulk characterizations of CNx thin films made by r.f. magnetron sputtering
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| Autor/in / Beteiligte Person: | Tetard, Florent ; Tétard, F. ; Djemia, P. ; Angleraud, B. ; Mubumbila, N. ; Tessier, P. ; Laboratoire des Sciences des Procédés et des Matériaux (LSPM) ; Université Paris 13 (UP13)-Institut Galilée-Université Sorbonne Paris Cité (USPC)-Centre National de la Recherche Scientifique (CNRS) ; Institut des Matériaux Jean Rouxel (IMN) ; Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST) ; Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN) ; Université de Nantes (UN)-Université de Nantes (UN) ; ERRSCa ; University, Nantes' |
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| Quelle: | Surface and Coatings Technology Surface and Coatings Technology, Elsevier, 2002, 151-152, pp.184-188. ⟨10.1016/S0257-8972(01)01574-2⟩; (2002-03-01) |
| Veröffentlichung: | HAL CCSD, 2002 |
| Medientyp: | unknown |
| ISSN: | 0257-8972 (print) |
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