Fabrication of monolithic polymer nanofluidic channels using nanowires as sacrificial templates
In: Nanotechnology, Jg. 21 (2010-09-24), S. 425302-425302
Online
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Zugriff:
We report a facile and reliable method to fabricate polymer-based monolithic nanofluidic channels. The nanochannels are obtained via three main steps: (1) fabrication of nanowire-transistor like structures, which are silver or zinc oxide nanowires horizontally bridging two electrodes made of zinc oxide on SiO(2)/Si substrates; (2) casting and curing polyimide solution on the nanowire structures; and (3) selective etching of the nanowire and electrode templates against the polyimide substrates. This process leads to the production of nanochannels with a diameter down to ∼ 50 nm. Our method is based on nanowires that are chemically synthesized whereas nanopattern fabrication conventionally relies on expensive equipment. Moreover, the polymer nanochannels are fabricated monolithically while a process of bonding two different materials is required in traditional methods where leakage problems are often identified at the interface. Construction of nanofluidic circuitry could be expected in the future based on the current work.
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Fabrication of monolithic polymer nanofluidic channels using nanowires as sacrificial templates
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Autor/in / Beteiligte Person: | Boo Hyun An ; Tae Yeon Seong ; Kim, Woong ; Joon Ho Oh ; Young Rag Do ; Kyo Seon Chu ; Chung, Haegeun ; Young Keun Kim ; Jae Hyoung Park ; Seung Wook Kim |
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Zeitschrift: | Nanotechnology, Jg. 21 (2010-09-24), S. 425302-425302 |
Veröffentlichung: | IOP Publishing, 2010 |
Medientyp: | unknown |
ISSN: | 1361-6528 (print) ; 0957-4484 (print) |
DOI: | 10.1088/0957-4484/21/42/425302 |
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