CMOS-integrated geometrically tunable optical filters
In: Applied Optics, Jg. 52 (2013-03-07), S. 1655-1655
Online
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Zugriff:
We present a method for producing monolithically integrated complementary metal-oxide-semiconductor (CMOS) optical filters with different and customer-specific responses. The filters are constituted by a Fabry-Perot resonator formed by two Bragg mirrors separated by a patterned cavity. The filter response can be tuned by changing the geometric parameters of the patterning, and consequently the cavity effective refractive index. In this way, many different filters can be produced at once on a single chip, allowing multichanneling. The filter has been designed, produced, and characterized. The results for a chip with 24 filters are presented.
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CMOS-integrated geometrically tunable optical filters
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Autor/in / Beteiligte Person: | Lerose, Damiana ; Bach, Konrad ; Schmidt, Frank ; Frank Michael Schulze ; Bong Ching Ching ; Evie Kho Siaw Hei ; Schmidt, Andrei ; Sterger, Martin ; Liau Chu Yaw |
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Zeitschrift: | Applied Optics, Jg. 52 (2013-03-07), S. 1655-1655 |
Veröffentlichung: | The Optical Society, 2013 |
Medientyp: | unknown |
ISSN: | 2155-3165 (print) ; 1559-128X (print) |
DOI: | 10.1364/ao.52.001655 |
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