Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process

Chih Hsuan Lin ; Song, Chao-Hung ; et al.

In: Micromachines, Jg. 12 (2021-03-17), Heft 314, p 314

Online unknown

Zugriff:

A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide-semiconductor (CMOS) 0.18 μm process. The readout circuit used the nested chopper, correlated double-sampling (CDS), noise reduction method

the frequency division multiplexing method

the time-division multiplexing method

and the calibration method. Sensing was performed by exciting the MEMS three-axis magnetometer at X/Y/Z axes mechanical resonant frequencies of 3.77/7.05/7.47 kHz, respectively. A modest die-level vacuum packaging resulted in in-plane and out-of-plane mechanical quality factors of 471–500 and 971–1000, respectively. The sensitivities of both the three-axis magnetometer with 2 mA driving current and the three-axis accelerometer were 7.1–10.7 uV/uT and 58.37–88.87 uV/ug. The resolutions of both the three-axis magnetometer with 2 mA driving current and three-axis accelerometer resolution were 44.06–87.46 nT/√Hz and 5.043–7.5 ng/√Hz. The resolution was limited by circuit noise equivalent acceleration (CNEM) and Brownian noise equivalent magnetic field (BNEM).

Titel:	Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process
Autor/in / Beteiligte Person:	Chih Hsuan Lin ; Song, Chao-Hung ; Wen, Kuei-Ann
Link:	View record in OpenAIRE (Volltext)
Zeitschrift:	Micromachines, Jg. 12 (2021-03-17), Heft 314, p 314
Veröffentlichung:	Multidisciplinary Digital Publishing Institute, 2021
Medientyp:	unknown
ISSN:	2072-666X (print)
DOI:	10.3390/mi12030314
Schlagwort:	Magnetometer lcsh:Mechanical engineering and machinery three-axis accelerometer 02 engineering and technology Integrated circuit Hardware_PERFORMANCEANDRELIABILITY Accelerometer Article law.invention Chopper Application-specific integrated circuit law Hardware_GENERAL 0202 electrical engineering, electronic engineering, information engineering Hardware_INTEGRATEDCIRCUITS lcsh:TJ1-1570 Electrical and Electronic Engineering Physics Microelectromechanical systems business.industry Mechanical Engineering 020208 electrical & electronic engineering 021001 nanoscience & nanotechnology three-axis magnetometer CMOS Control and Systems Engineering microelectromechanical systems Brownian noise Optoelectronics 0210 nano-technology business Hardware_LOGICDESIGN
Sonstiges:	Nachgewiesen in: OpenAIRE Sprachen: English File Description: application/pdf Language: English Rights: OPEN

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