The Effect of Surface Treatment on Structural Properties of CVD Diamond Layers with Different Grain Sizes Studied by Raman Spectroscopy

Dychalska, Anna ; Trzcinski, Marek ; et al.

In: Materials, Jg. 14 (2021-03-08), Heft 1301, p 1301

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Extensive Raman spectroscopy studies combined with scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) measurements were performed to investigate structural and chemical changes in diamond layers deposited by chemical vapour deposition (CVD) upon post-growth treatment with hydrogen. The aim of this study is to characterize the changes in micro-structural properties of diamond layers with different grain sizes and different contents of sp2 carbon phase. Hydrogenation or oxidization of diamond layer surface is often performed to modify its properties

however, it can also strongly affect the surface structure. In this study, the impact of hydrogenation on the structure of diamond layer surface and its chemical composition is investigated. Owing to their polycrystalline nature, the structural properties of CVD diamond layers can strongly differ within the same layer. Therefore, in this project, in order to compare the results before and after hydrogen treatment, the diamond layers are subjected to Raman spectroscopy studies in the vicinity of a T-shape marker fabricated on the surface of each diamond layer studied.

Titel:	The Effect of Surface Treatment on Structural Properties of CVD Diamond Layers with Different Grain Sizes Studied by Raman Spectroscopy
Autor/in / Beteiligte Person:	Dychalska, Anna ; Trzcinski, Marek ; Szybowicz, Mirosław ; Koczorowski, Wojciech ; Mosińska, L.
Link:	Volltext (PDF) View record in OpenAIRE (Volltext)
Zeitschrift:	Materials, Jg. 14 (2021-03-08), Heft 1301, p 1301
Veröffentlichung:	Multidisciplinary Digital Publishing Institute, 2021
Medientyp:	unknown
ISSN:	1996-1944 (print)
DOI:	10.3390/ma14051301
Schlagwort:	congenital, hereditary, and neonatal diseases and abnormalities Materials science Scanning electron microscope Material properties of diamond chemistry.chemical_element Chemical vapor deposition engineering.material lcsh:Technology Article symbols.namesake X-ray photoelectron spectroscopy hemic and lymphatic diseases parasitic diseases XPS General Materials Science lcsh:Microscopy hydrogen treatment lcsh:QC120-168.85 CA lcsh:QH201-278.5 lcsh:T Diamond diamond CVD body regions chemistry Chemical engineering lcsh:TA1-2040 Raman spectroscopy SEM symbols engineering lcsh:Descriptive and experimental mechanics Crystallite lcsh:Electrical engineering. Electronics. Nuclear engineering lcsh:Engineering (General). Civil engineering (General) Carbon lcsh:TK1-9971
Sonstiges:	Nachgewiesen in: OpenAIRE Sprachen: English File Description: application/pdf Language: English Rights: OPEN

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