Scalably manufactured high-index atomic layer-polymer hybrid metasurfaces for high-efficiency virtual reality metaoptics in the visible
2022
Online
report
Metalenses, which exhibit superior light-modulating performance with sub-micrometer-scale thicknesses, are suitable alternatives to conventional bulky refractive lenses. However, fabrication limitations, such as a high cost, low throughput, and small patterning area, hinder their mass production. Here, we demonstrate the mass production of low-cost, high-throughput, and large-aperture visible metalenses using an argon fluoride immersion scanner and wafer-scale nanoimprint lithography. Once a 12-inch master stamp is imprinted, hundreds of centimeter-scale metalenses can be fabricated. To enhance light confinement, the printed metasurface is thinly coated with a high-index film, resulting in drastic increase of conversion efficiency. As a proof of concept, a prototype of a virtual reality device with ultralow thickness is demonstrated with the fabricated metalens.
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Scalably manufactured high-index atomic layer-polymer hybrid metasurfaces for high-efficiency virtual reality metaoptics in the visible
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Autor/in / Beteiligte Person: | Kim, Joohoon ; Seong, Junhwa ; Kim, Wonjoong ; Lee, Gun-Yeal ; Kim, Hongyoon ; Moon, Seong-Won ; Jang, Jaehyuck ; Kim, Yeseul ; Yang, Younghwan ; Oh, Dong Kyo ; Park, Chanwoong ; Choi, Hojung ; Jeon, Hyeongjin ; Lee, Kyung-Il ; Lee, Byoungho ; Lee, Heon ; Rho, Junsuk |
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Veröffentlichung: | 2022 |
Medientyp: | report |
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