Effects of Gettering on Epi Quality for CMOS Technology
In: Emerging Semiconductor Technology, Jg. 1987 (1987), Heft 960, S. 51-64
academicJournal
Zugriff:
Titel: |
Effects of Gettering on Epi Quality for CMOS Technology
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Autor/in / Beteiligte Person: | Daniel Wong, C-C ; Borland, JO ; Hahn, S ; Gupta, DC |
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Zeitschrift: | Emerging Semiconductor Technology, Jg. 1987 (1987), Heft 960, S. 51-64 |
Veröffentlichung: | 1987 |
Medientyp: | academicJournal |
ISBN: | 0-8031-0459-6 (print) ; 0-8031-5021-0 (print) ; 978-0-8031-0459-4 (print) ; 978-0-8031-5021-8 (print) |
DOI: | 10.1520/STP25740S |
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