130 nm SOI CMOS technology for microwaves applications ; Utilisation des technologies CMOS SOI 130 nm pour des applications en gamme de fréquences millimétriques

rédiger entre mai et octobre 2005 technologie CMOS SOI 130 nm, ST-Microelectronics ; Silicon On Insulator (SOI) CMOS technology has already shown good performances for digital applications compared to bulk CMOS technology. At nanometer-scale, SOI CMOS transistors exhibit very high cut-off frequencies, enabling the design of millimeter-wave integrated circuits and therefore the joint integration of microwave circuits with low frequency analog and high-speed digital functions for SoC applications. However, high losses in passive components remain the main limiting factor for microwave applications with CMOS technologies. The purpose of this work was to investigate the advantages of a standard 130 nm SOI CMOS process provided by ST-Microelectronics (Crolles), for microwave applications beyond 20 GHz, by designing typical microwave transceiver circuits. Three distributed amplifiers in K band were designed and measured, enabling our models validation. Despite high losses in transmission lines reducing achievable gain and bandwidth, measured performances show the interest in using SOI CMOS for microwave applications. Then, a new series of circuits – distributed amplifiers, low noise amplifiers and active mixers – using transmission lines with lower losses were designed. Performances simulations show a significant improvement with a twofold gain-bandwidth product increase for the distributed amplifier and CMOS state-of-the-art performances for low noise amplifiers and mixers. ; La technologie CMOS SOI (« Silicon On Insulator ») a déjà montré son intérêt pour les circuits numériques par rapport à la technologie CMOS sur substrat massif (« bulk »). Avec l'entrée des technologies CMOS dans l'ère des dimensions nanométriques, les transistors atteignent des fréquences de coupures élevées, ouvrant la voie aux applications hyperfréquences et de ce fait à l'intégration sur la même puce des circuits numériques, analogiques et hyperfréquences. Cependant, la piètre qualité des éléments passifs reste le principal verrou des ...