Design of RF circuits on Benzocyclobutene polymer (BCB) for millimeter wave and THz applications ; Conception de circuits RF sur polymère Benzocyclobutène (BCB) pour des applications à ondes millimétriques et THz

New applications in the submillimeter frequency range require rapid development of traffic and require a significant increase in transmission capacity, whether in telecommunications, imaging or spectroscopy. Today, this increase in transmission capacity is achieved either by improving spectral efficiency or by broadening the spectrum used, necessitating the use of frequency ranges above 300 GHz. In recent years, these new applications, involving high data rates, have aroused the interest and effort of many research teams who have carried out studies focusing more on active devices than on passive devices. The subject of this thesis concerns passive circuits for the millimeter and the THz. For the realization of integrated passive functions and circuits, polymers appear particularly interesting and relevant because of their excellent intrinsic performance, and their ability to be able to adapt and integrate into the various existing microelectronic technologies such as MOS Si, BiCMOS, SiGe, MMIC GaAs, GaN or InP. As part of this thesis, the study carried out focused on the design and realization of passive circuits in the frequency range from millimeter to THz on the Benzocyclobutene (BCB) polymer. For this, antennas with innovative topologies and single-mode low-loss metal waveguides with a very high quality factor were simulated, produced and characterized. The BCB polymer was chosen because it exhibits low losses at THz frequencies and a low real part of the permittivity which reduces radiation losses, thus improving the efficiency of passive circuits at these frequencies. The other advantage of this polymer lies in the ease of depositing it (by centrifugation) on top of any type of substrate and / or integrated circuits. This allow to produce systems including active and passive circuits on the same device while reducing interconnections. In order to validate the concept, several devices are realized and characterized using the technological means of the CTU of C2N (of the Renatech network). First, GCPW ...