Design, Development, And Integration Of A Meso-scale Eletrostatic Phase Shifter On Microwave Laminate

Recent developments in the area of microfabrication technologies, has enabled the fabrication of many radio frequency/microwave components with better performance and lower cost than possible with semiconductor based fabrication technology. Many of these microfabricated RF components such as switches and phase shifters, popularly known as RF MEMS, are aimed at reducing the insertion loss and improving other performance parameters such as linearity. For these devices size miniaturization is not necessarily important, as in practical subsystems, these components are integrated with RF front-ends on a laminate. This thesis deals with concepts of a low cost passive phase shifter fabricated in-situ on a microwave laminate. The operation of this Mesoscale Electrostatically actuated Phase shifter on microwave Laminate (MEPL) is similar to that of a micromachined distributed MEMS transmission line (DMTL) phase shifter. In spite of advantages of low losses, wide bandwidth, low DC power consumption and high linearity over semiconductor/MMIC technology, microfabricated phase shifters are often not used in field because of issues related to fabrication reliability, packaging and integration. On the other hand, the proposed MEPL will have all the advantages of conventional MEMS phase shifters with additional benefit of lower cost. Furthermore, these are integrable to form a monolithic phased array. A MEPL phase shifter of 50-bridges periodically distributed on the co-planar waveguide (CPW) transmission line is demonstrated in this thesis. MEMS air bridges are electrostatically actuated to vary the capacitance of the transmission line, which changes the phase velocity of the propagation RF signal, consequently phase at the output port. The realized MEPL is characterized for electromagnetic as well as electromechanical performance. The electromechanical characterization of this device is performed using a Laser Doppler Vibrometer (LDV). The measured data showed good agreement with the analytical data. Major application of a ...