Diamond-Like Carbon Thin Films Deposition on Glass Using an Electron Cyclotron Resonance (ECR) Microwave Chemical Vapor Deposition (CVD) System
In: Advanced Tribology ; page 816-819 ; ISBN 9783642036521 9783642036538; (2009)
Buch
Zugriff:
Titel: |
Diamond-Like Carbon Thin Films Deposition on Glass Using an Electron Cyclotron Resonance (ECR) Microwave Chemical Vapor Deposition (CVD) System
|
---|---|
Autor/in / Beteiligte Person: | Zhang, Guangan ; Wang, Liping ; Yan, Pengxun ; Zhang, Junyan |
Link: | |
Quelle: | Advanced Tribology ; page 816-819 ; ISBN 9783642036521 9783642036538; (2009) |
Veröffentlichung: | Springer Berlin Heidelberg, 2009 |
Medientyp: | Buch |
ISBN: | 978-3-642-03652-1 (print) ; 978-3-642-03653-8 (print) ; 3-642-03652-X (print) ; 3-642-03653-8 (print) |
DOI: | 10.1007/978-3-642-03653-8_270 |
Sonstiges: |
|