Control of oxygen for magnetron sputtered ZnO:Al window layer in Cu(In,Ga)Se 2 thin film solar cells
In: physica status solidi (a) ; volume 214, issue 10 ; ISSN 1862-6300 1862-6319, 2017
academicJournal
Zugriff:
In this study, aluminum doped zinc oxide (ZnO:Al) thin films were prepared by magnetron sputtering from a ceramic target at room temperature for application in Cu(In,Ga)Se 2 (CIGS) thin film solar cells as a window layer. Different oxygen‐argon mixture gas fluxes (5% O 2 in Ar) were input in the deposition chamber during the preparation of ZnO:Al thin films. The influences of oxygen content on different properties of sputtered ZnO:Al thin films, including grain structure, optical and electrical properties, were systematically investigated. High O 2 ‐Ar mixture gas flux leads to a low dynamic deposition rate, a high light transmission and a high resistivity. The CIGS thin film solar cells show a high short circuit current density but a low fill factor when ZnO:Al window layer is prepared at a high O 2 ‐Ar mixture gas flux, which is related to the enhanced transmission and resistivity of ZnO:Al thin films with an increasing O 2 ‐Ar mixture gas flux. The highest efficiency CIGS thin film solar cell of 14.7% has been achieved with the structure of SLG/Mo/CIGS/CdS/i‐ZnO/ZnO:Al/(Ni/Al/Ni)grids/MgF 2 when the O 2 ‐Ar mixture gas flux is 1.5 sccm here.
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Control of oxygen for magnetron sputtered ZnO:Al window layer in Cu(In,Ga)Se 2 thin film solar cells
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Autor/in / Beteiligte Person: | Niu, X. ; Zhu, H. ; Zhang, W. ; Laing, X. ; Guo, Y. ; Li, Z. ; Chen, J. ; Xu, Y. ; Mai, Y. ; National Natural Science Foundation of China ; Natural Science Foundation of Hebei Province |
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Zeitschrift: | physica status solidi (a) ; volume 214, issue 10 ; ISSN 1862-6300 1862-6319, 2017 |
Veröffentlichung: | Wiley, 2017 |
Medientyp: | academicJournal |
DOI: | 10.1002/pssa.201700132 |
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