MEMS de Piano - an Experimental Course of Design, Fabrication, and Testing of MEMS Oscillator
In: Proc. of EWME ; https://hal.archives-ouvertes.fr/hal-00982149 ; Proc. of EWME, 2014, Tallinn, Estonia. ⟨10.1109/EWME.2014.6877420⟩, 2014
Konferenz
Zugriff:
International audience ; Since 2005, an experimental course of design, fabrication, and testing of MEMS resonators is given to undergraduate and graduate students of the University of Tokyo. Through the experiences, an optimal-for-course resonator design (= the design with which all students have working device) was identified. Several “golden rules” were described for deeper students' understanding. Further extension of the course is presented in the paper: Integration with VLSI read-out circuit. A capacitance readout ASIC that can monolithically be integrated with MEMS resonator was fabricated with 0.6 μm CMOS technology on an SOI wafer and its functionality was verified.
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MEMS de Piano - an Experimental Course of Design, Fabrication, and Testing of MEMS Oscillator
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| Autor/in / Beteiligte Person: | Mita, Y. ; Kubota, M. ; Denoual, Matthieu ; Lebrasseur, E. ; Sawamura, T. ; The University of Tokyo (UTokyo) ; Equipe Electronique - Laboratoire GREYC - UMR6072 ; Groupe de Recherche en Informatique, Image et Instrumentation de Caen (GREYC) ; Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN) ; Normandie Université (NU)-Normandie Université (NU)-Université de Caen Normandie (UNICAEN) ; Normandie Université (NU)-Centre National de la Recherche Scientifique (CNRS)-École Nationale Supérieure d'Ingénieurs de Caen (ENSICAEN) ; Normandie Université (NU) |
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| Zeitschrift: | Proc. of EWME ; https://hal.archives-ouvertes.fr/hal-00982149 ; Proc. of EWME, 2014, Tallinn, Estonia. ⟨10.1109/EWME.2014.6877420⟩, 2014 |
| Veröffentlichung: | HAL CCSD, 2014 |
| Medientyp: | Konferenz |
| DOI: | 10.1109/EWME.2014.6877420 |
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