SI-Homoepitaxy by Electron Cyclotron Resonance CVD : IEEE photovoltaic specialists conference
In: CONFERENCE RECORD IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE; S. 755-758
Konferenz
Zugriff:
Titel: |
SI-Homoepitaxy by Electron Cyclotron Resonance CVD : IEEE photovoltaic specialists conference
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Autor/in / Beteiligte Person: | Conrad, E. ; Elstner, L. ; Fuhs, W. ; Henrion, W. |
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Quelle: | CONFERENCE RECORD IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE; S. 755-758 |
Medientyp: | Konferenz |
ISBN: | 978-0-7803-3767-1 (print) ; 978-0-7803-3768-8 (print) ; 0-7803-3767-0 (print) ; 0-7803-3768-9 (print) |
ISSN: | 0160-8371 (print) |
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