A 1mG Lateral CMOS-MEMS Accelerometer : Micro electro mechanical systems
In: ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS; (2000) S. 502-507
Konferenz
Zugriff:
Titel: |
A 1mG Lateral CMOS-MEMS Accelerometer : Micro electro mechanical systems
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Autor/in / Beteiligte Person: | Luo, H. ; Fedder, G. K. ; Carley, L. R. |
Link: | |
Quelle: | ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS; (2000) S. 502-507 |
Veröffentlichung: | 2000 |
Medientyp: | Konferenz |
ISBN: | 978-0-7803-5274-2 (print) ; 978-0-7803-5273-5 (print) ; 978-0-7803-5275-9 (print) ; 0-7803-5274-2 (print) ; 0-7803-5273-4 (print) ; 0-7803-5275-0 (print) |
ISSN: | 1084-6999 (print) |
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