Metal Film Protection of CMOS Wafers against KOH : Micro electro mechanical systems
In: ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS; (2000) S. 608-613
Konferenz
Zugriff:
Titel: |
Metal Film Protection of CMOS Wafers against KOH : Micro electro mechanical systems
|
---|---|
Autor/in / Beteiligte Person: | Munch, U. ; Brand, O. ; Paul, O. ; Baltes, H. ; Bossel, M. |
Link: | |
Quelle: | ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS; (2000) S. 608-613 |
Veröffentlichung: | 2000 |
Medientyp: | Konferenz |
ISBN: | 978-0-7803-5274-2 (print) ; 978-0-7803-5273-5 (print) ; 978-0-7803-5275-9 (print) ; 0-7803-5274-2 (print) ; 0-7803-5273-4 (print) ; 0-7803-5275-0 (print) |
ISSN: | 1084-6999 (print) |
Sonstiges: |
|