2.I 'The Impact on Tungsten Deposition Uniformity Due to Collapse of the Purge Ring on WxZ Tungsten Heaters' : VLSI multilevel interconnection conference
In: INTERNATIONAL VSLI MULTILEVEL INTERCONNECTION CONFERENCE; (2001) S. 68-70
Konferenz
Zugriff:
Titel: |
2.I 'The Impact on Tungsten Deposition Uniformity Due to Collapse of the Purge Ring on WxZ Tungsten Heaters' : VLSI multilevel interconnection conference
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Autor/in / Beteiligte Person: | Gonsalves, M. ; Sidhwa, A. ; Dennis, K. ; Gandy, T. ; Spinner, C. |
Link: | |
Quelle: | INTERNATIONAL VSLI MULTILEVEL INTERCONNECTION CONFERENCE; (2001) S. 68-70 |
Veröffentlichung: | 2001 |
Medientyp: | Konferenz |
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