CAD navigation system for backside waveform probing of CMOS devices : Reliability of electron devices, failure physics and analysis; ESREF 2002
In: MICROELECTRONICS RELIABILITY 42(NO 9-11):1679-1684; Jg. 42 (2002) NO 9-11, S. 1679-1684
Konferenz
Zugriff:
Titel: |
CAD navigation system for backside waveform probing of CMOS devices : Reliability of electron devices, failure physics and analysis; ESREF 2002
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Autor/in / Beteiligte Person: | Miura, K. ; Nakamae, K. ; Fujioka, H. |
Link: | |
Quelle: | MICROELECTRONICS RELIABILITY 42(NO 9-11):1679-1684; Jg. 42 (2002) NO 9-11, S. 1679-1684 |
Veröffentlichung: | 2002 |
Medientyp: | Konferenz |
ISSN: | 0026-2714 (print) |
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