Characterization, modelling and performance evaluation of CMOS integrated multielectrode tunable capacitor (MTC) : 15th European workshop on micromechanics (MME)
In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING 15(NO 7):S122-S131; Jg. 15 (2005) NO 7, S. S122- (10S.)
Online
Konferenz
Zugriff:
Titel: |
Characterization, modelling and performance evaluation of CMOS integrated multielectrode tunable capacitor (MTC) : 15th European workshop on micromechanics (MME)
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Autor/in / Beteiligte Person: | Olszewski, Z. ; Hill, M. ; O Mahony, C. ; Duane, R. ; Houlihan, R. |
Link: | |
Quelle: | JOURNAL OF MICROMECHANICS AND MICROENGINEERING 15(NO 7):S122-S131; Jg. 15 (2005) NO 7, S. S122- (10S.) |
Veröffentlichung: | 2005 |
Medientyp: | Konferenz |
ISSN: | 0960-1317 (print) |
Sonstiges: |
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