A study of Ti–C–N(H) and Ti:CNx(H) coatings grown with a magnetron sputtering/PECVD hybrid deposition process : Protective coatings and thin films; E-MRS
In: SURFACE AND COATINGS TECHNOLOGY 200(22/23):6230-6234; Jg. 200 (2006) 22/23, S. 6230-6234
Konferenz
Zugriff:
Titel: |
A study of Ti–C–N(H) and Ti:CNx(H) coatings grown with a magnetron sputtering/PECVD hybrid deposition process : Protective coatings and thin films; E-MRS
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Autor/in / Beteiligte Person: | Restello, S. ; Boscarino, D. ; Rigato, V. |
Link: | |
Quelle: | SURFACE AND COATINGS TECHNOLOGY 200(22/23):6230-6234; Jg. 200 (2006) 22/23, S. 6230-6234 |
Veröffentlichung: | 2006 |
Medientyp: | Konferenz |
ISSN: | 0257-8972 (print) |
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