CMOS microhotplate sensor system for operating temperatures up to 500degreeC : International conference on solid-state sensors actuators and microsystems; TRANSDUCERS '05
In: SENSORS AND ACTUATORS B 117(NO 2):346-352; Jg. 117 (2006) NO 2, S. 346-352
Konferenz
Zugriff:
Titel: |
CMOS microhotplate sensor system for operating temperatures up to 500degreeC : International conference on solid-state sensors actuators and microsystems; TRANSDUCERS '05
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Autor/in / Beteiligte Person: | Graf, M. ; Barrettino, D. ; Kirstein, K. U. ; Hierlemann, A. |
Link: | |
Quelle: | SENSORS AND ACTUATORS B 117(NO 2):346-352; Jg. 117 (2006) NO 2, S. 346-352 |
Veröffentlichung: | 2006 |
Medientyp: | Konferenz |
ISSN: | 0924-4247 (print) |
Sonstiges: |
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