High Yield Polymer MEMS Process for CMOS/MEMS Integration : Microelectromechanical Systems : materials and devices; Microelectromechanical systems-- materials and devices IV
In: MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS 1299:91-96; Jg. 1299 (2011) S. 91-96
Konferenz
Zugriff:
Titel: |
High Yield Polymer MEMS Process for CMOS/MEMS Integration : Microelectromechanical Systems : materials and devices; Microelectromechanical systems-- materials and devices IV
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Autor/in / Beteiligte Person: | Ray, P. ; Seena, V. ; Apte, P.R. ; Rao, R. |
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Quelle: | MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS 1299:91-96; Jg. 1299 (2011) S. 91-96 |
Veröffentlichung: | 2011 |
Medientyp: | Konferenz |
ISBN: | 978-1-60511-276-3 (print) ; 1-60511-276-3 (print) |
ISSN: | 0272-9172 (print) |
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