Microstructure and electronic properties of microcrystalline silicon carbide thin films prepared by hot-wire CVD : Hot-wire CVD (cat-CVD) process
In: THIN SOLID FILMS 519(14):4511-4515; Jg. 519 (2011) 14, S. 4511-4515
Konferenz
Zugriff:
Titel: |
Microstructure and electronic properties of microcrystalline silicon carbide thin films prepared by hot-wire CVD : Hot-wire CVD (cat-CVD) process
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Autor/in / Beteiligte Person: | Chen, T. ; Kohler, F. ; Heidt, A. ; Huang, Y. ; Finger, F. ; Carius, R. |
Link: | |
Quelle: | THIN SOLID FILMS 519(14):4511-4515; Jg. 519 (2011) 14, S. 4511-4515 |
Veröffentlichung: | 2011 |
Medientyp: | Konferenz |
ISSN: | 1879-2731 (print) |
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