Capacitance Characterization of Gate to LDD Overlap Region to Understand Subtle Fail Modes in Advanced Node Technologies : 45th international symposium for testing and failure analysis
In: Proceedings 45:359-365; Jg. 45 (2019) S. 359-365
Konferenz
Zugriff:
Titel: |
Capacitance Characterization of Gate to LDD Overlap Region to Understand Subtle Fail Modes in Advanced Node Technologies : 45th international symposium for testing and failure analysis
|
---|---|
Autor/in / Beteiligte Person: | Kodali, Satish ; Banghart, Edmund ; Davidson, Kevin ; Zhang, Yu ; Singh, Jagar ; Oh, Chong Khiam |
Link: | |
Quelle: | Proceedings 45:359-365; Jg. 45 (2019) S. 359-365 |
Veröffentlichung: | 2019 |
Medientyp: | Konferenz |
ISSN: | 0890-1740 (print) |
Sonstiges: |
|