Advanced ILT solutions to manufacture photonics designs : Optical Microlithography XXXIV
In: Proceedings of SPIE, the International Society for Optical Engineering 11613:116130M-116130M-7; Jg. 11613 (2021) S. 116130M
Konferenz
Zugriff:
Titel: |
Advanced ILT solutions to manufacture photonics designs : Optical Microlithography XXXIV
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Autor/in / Beteiligte Person: | Zeggaoui, Nassima ; Tritchkov, Alexander ; Kobelkov, Sergey |
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Quelle: | Proceedings of SPIE, the International Society for Optical Engineering 11613:116130M-116130M-7; Jg. 11613 (2021) S. 116130M |
Veröffentlichung: | 2021 |
Medientyp: | Konferenz |
ISBN: | 978-1-5106-4059-7 (print) ; 1-5106-4059-2 (print) |
ISSN: | 0277-786X (print) |
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