Design and simulation of thermal actuators for STM applications in a standard CMOS process [3675-02] : Materials and Device Characterization in Micromachining II
In: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 1999, Heft E 3875, S. 32-39
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Titel: |
Design and simulation of thermal actuators for STM applications in a standard CMOS process [3675-02] : Materials and Device Characterization in Micromachining II
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Autor/in / Beteiligte Person: | Eagle, S. ; Lakdawala, H. ; Fedder, G. K. |
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Zeitschrift: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 1999, Heft E 3875, S. 32-39 |
Veröffentlichung: | 1999 |
Medientyp: | serialPeriodical |
ISSN: | 0361-0748 (print) |
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