(Invited)Â Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials
In: ECS transactions, Jg. 97 (2020), Heft 5, S. 79-90
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Titel: |
(Invited)Â Post-CMOS Compatible Silicon MEMS Nano-Tactile Sensor for Touch Feeling Discrimination of Materials
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Autor/in / Beteiligte Person: | Takao, H. |
Link: | |
Zeitschrift: | ECS transactions, Jg. 97 (2020), Heft 5, S. 79-90 |
Veröffentlichung: | 2020 |
Medientyp: | serialPeriodical |
ISSN: | 1938-5862 (print) |
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