CMOS- compatible fabrication method of graphene-based micro devices
In: Materials science in semiconductor processing, Jg. 67 (2017), S. 92-97
serialPeriodical
Zugriff:
Titel: |
CMOS- compatible fabrication method of graphene-based micro devices
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Autor/in / Beteiligte Person: | Koczorowski, W. ; Kuświk, P. ; Przychodnia, M. ; Wiesner, K. ; El-Ahmar, S. ; Szybowicz, M. ; Nowicki, M. ; Strupiński, W. ; Czajka, R. |
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Zeitschrift: | Materials science in semiconductor processing, Jg. 67 (2017), S. 92-97 |
Veröffentlichung: | 2017 |
Medientyp: | serialPeriodical |
ISSN: | 1369-8001 (print) |
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