Processing of n+/p−/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates
In: Nuclear instruments and methods in physics research section A, Jg. 828 (2016), S. 46-51
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Zugriff:
Titel: |
Processing of n+/p−/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates
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Autor/in / Beteiligte Person: | Härkönen, J. ; Tuovinen, E. ; Luukka, P. ; Gädda, A. ; Mäenpää, T. ; Tuominen, E. ; Arsenovich, T. ; Junkes, A. ; Wu, X. ; Li, Z. |
Link: | |
Zeitschrift: | Nuclear instruments and methods in physics research section A, Jg. 828 (2016), S. 46-51 |
Veröffentlichung: | 2016 |
Medientyp: | serialPeriodical |
ISSN: | 0168-9002 (print) |
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