A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation
In: Journal of microelectromechanical systems, Jg. 28 (2019), Heft 5, S. 841-849
Online
serialPeriodical
Zugriff:
Titel: |
A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation
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Autor/in / Beteiligte Person: | Xu, Wei ; Ma, Shenhui ; Wang, Xiaoyi ; Chiu, Yi ; Lee, Yi-Kuen |
Link: | |
Zeitschrift: | Journal of microelectromechanical systems, Jg. 28 (2019), Heft 5, S. 841-849 |
Veröffentlichung: | 2019 |
Medientyp: | serialPeriodical |
ISSN: | 1057-7157 (print) |
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