A CMOS-Integrated MEMS Platform for Frequency Stable Resonators—Part II: Design and Analysis
In: Journal of microelectromechanical systems, Jg. 28 (2019), Heft 5, S. 755-765
Online
serialPeriodical
Zugriff:
Titel: |
A CMOS-Integrated MEMS Platform for Frequency Stable Resonators—Part II: Design and Analysis
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Autor/in / Beteiligte Person: | Chen, Chao-Yu ; Li, Ming-Huang ; Li, Cheng-Syun ; Li, Sheng-Shian |
Link: | |
Zeitschrift: | Journal of microelectromechanical systems, Jg. 28 (2019), Heft 5, S. 755-765 |
Veröffentlichung: | 2019 |
Medientyp: | serialPeriodical |
ISSN: | 1057-7157 (print) |
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