Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning
In: Journal of microelectromechanical systems, Jg. 29 (2020), Heft 5, S. 978-983
Online
serialPeriodical
Zugriff:
Titel: |
Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning
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Autor/in / Beteiligte Person: | Lin, Yi-Chung ; Chung, Vincent P. J. ; Santhanam, Suresh ; Mukherjee, Tamal ; Fedder, Gary K. |
Link: | |
Zeitschrift: | Journal of microelectromechanical systems, Jg. 29 (2020), Heft 5, S. 978-983 |
Veröffentlichung: | 2020 |
Medientyp: | serialPeriodical |
ISSN: | 1057-7157 (print) |
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