Electro-Thermally Actuated Non-Volatile Mechanical Memory With CMOS-Level Operation Voltage and Low Contact Resistance
In: Journal of microelectromechanical systems, Jg. 31 (2022), Heft 1, S. 87-96
Online
serialPeriodical
Zugriff:
Titel: |
Electro-Thermally Actuated Non-Volatile Mechanical Memory With CMOS-Level Operation Voltage and Low Contact Resistance
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Autor/in / Beteiligte Person: | Choi, Pan Kyu ; Lee, Yong-Bok ; Kim, Suhyun ; Kim, Tae-Soo ; Yoon, Jun-Bo |
Link: | |
Zeitschrift: | Journal of microelectromechanical systems, Jg. 31 (2022), Heft 1, S. 87-96 |
Veröffentlichung: | 2022 |
Medientyp: | serialPeriodical |
ISSN: | 1057-7157 (print) |
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