Effect of precursor gas inlet position relative to hot wire cells in HWC-IP-PECVD systems for low-temperature graphene growth
In: Materials research innovations, Jg. 27 (2023), Heft 3, S. 131-137
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Zugriff:
Titel: |
Effect of precursor gas inlet position relative to hot wire cells in HWC-IP-PECVD systems for low-temperature graphene growth
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Autor/in / Beteiligte Person: | Yusuf, Andi Momang ; Abidin, Kurniati ; Eliyana, Ajeng ; Usman, Ida ; Malago, Jasruddin Daud ; Noor, Fatimah Arofiati ; Winata, Toto |
Link: | |
Zeitschrift: | Materials research innovations, Jg. 27 (2023), Heft 3, S. 131-137 |
Veröffentlichung: | 2023 |
Medientyp: | serialPeriodical |
ISSN: | 1432-8917 (print) |
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