Thermal conversions of some Ba, Sr, Ti oxide precursors for CVD
In: EUROCVD 13: Thirteenth European Conference on Chemical Vapor Deposition, Glyfada, Athens, Greece, August 26-31, 2001Journal de physique. IV 83:Pr3.621-Pr3.628
Konferenz
- print, 12 ref
Zugriff:
Gas phase composition and conversions under evaporation and thermal decomposition of Sr(dpm)2, Ba(dpm)2, TiO(dpm)2 and Ti(OPri)2(dpm)2 (dpm=C(CH3)3COCHCOC(CH3)3, Pri = CH(CH3)2) which are conventional CVD precursors for BST films have been studied by means of original mass spectrometric technique. Properties and thermal behaviour of these compounds have been compared with respect to CVD precursor. It has been shown that conversions leading to binuclear species formation occur under transportation of TiO(dpm)2 into deposition zone. It has been reported alike decomposition mechanism of Sr and Ba precursors. Influence of oxygen on thermal stability and products of decomposition of the source compound has been shown.
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Thermal conversions of some Ba, Sr, Ti oxide precursors for CVD
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Autor/in / Beteiligte Person: | TURGAMBAEVA, A. E ; IGUMENOV, I. K |
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Quelle: | EUROCVD 13: Thirteenth European Conference on Chemical Vapor Deposition, Glyfada, Athens, Greece, August 26-31, 2001Journal de physique. IV 83:Pr3.621-Pr3.628 |
Veröffentlichung: | Les Ulis: EDP sciences, 2001 |
Medientyp: | Konferenz |
Umfang: | print, 12 ref |
ISSN: | 1155-4339 (print) |
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