Micro-structural analysis of carbon nitride (CNx) film prepared by ion beam assisted magnetron sputtering

JUNG, Hae-Suk ; PARK, Hyung-Ho

In: Diamond 2001 : Proceedings of the 12th European Conference on Diamond, Dia mond-like Materials, Carbon Nanotubes, Nitrides & Silicon CarbideDiamond and related materials 11(3-6):1205-1209; Jg. 11 (2002) 3-6, S. 1205-1209

Konferenz - print, 10 ref

Wie komme ich dran?

The growth and structural evolution of carbon nitride (CNx) films, deposited by nitrogen ion beam assisted magnetron sputtering, were studied. The deposition rate, composition ([N]/[C] ratio), structure, and mechanical properties of CN, films were investigated as a function of nitrogen ion energy in the range of 30 eV-1 keV. For the ion energy below 200 eV, the increasing fraction of curved structure as revealed by transmission electron microscopy and sp3 hybridized bonding were attributed to structural transition and improved mechanical properties of CNx films. However, when increasing nitrogen ion energy above 200 eV, the [N]/[C] ratio in film was inversely proportional to the nitrogen ion energy and preferential distribution of nitrogen in sp2 hybridized site induced the retransition from curved structure to planar structure. From these results, it was found that CNx films exhibit two different structural and bonding characteristics with ion energy and this transition of film characteristic is closely related to the nitrogen content in the film.

Titel:	Micro-structural analysis of carbon nitride (CNx) film prepared by ion beam assisted magnetron sputtering
Autor/in / Beteiligte Person:	JUNG, Hae-Suk ; PARK, Hyung-Ho
Link:	E-Journal im Bestand der UB Hagen? View record from PASCAL Archive
Quelle:	Diamond 2001 : Proceedings of the 12th European Conference on Diamond, Dia mond-like Materials, Carbon Nanotubes, Nitrides & Silicon CarbideDiamond and related materials 11(3-6):1205-1209; Jg. 11 (2002) 3-6, S. 1205-1209
Veröffentlichung:	Amsterdam: Elsevier, 2002
Medientyp:	Konferenz
Umfang:	print, 10 ref
ISSN:	0925-9635 (print)
Schlagwort:	Crystallography Cristallographie cristallogenèse Sciences exactes et technologie Exact sciences and technology Physique Physics Etat condense: structure, proprietes mecaniques et thermiques Condensed matter: structure, mechanical and thermal properties Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques) Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Structure et morphologie de couches minces Thin film structure and morphology Structure et morphologie; épaisseur Structure and morphology; thickness Propriétés physiques non électroniques de couches minces Physical properties of thin films, nonelectronic Propriétés mécaniques et acoustiques Mechanical and acoustical properties Domaines interdisciplinaires: science des materiaux; rheologie Cross-disciplinary physics: materials science; rheology Science des matériaux Materials science Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie Methods of deposition of films and coatings; film growth and epitaxy Depôt par pulvérisation cathodique Deposition by sputtering Dépôt assisté par faisceaux électroniques et ioniques; placage ionique Ion and electron beam-assisted deposition; ion plating Composé minéral Inorganic compounds Nitrure Nitrides Azote ion Nitrogen ions Carbone nitrure Carbon nitrides Cinétique Kinetics Composition chimique Chemical composition Energie Energy Etat amorphe Amorphous state Etude expérimentale Experimental study Film Films Magnétron Magnetrons Microstructure Méthode IBAD Ion beam assisted deposition method Propriété mécanique Mechanical properties Préparation Preparation Preparación Pulvérisation cathodique Cathode sputtering Structure atomique Atomic structure Structure locale Local structure Estructura local C N CNx
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Conference Paper File Description: text Language: English Author Affiliations: Department of Ceramic Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-ku, Seoul 120-749, Korea, Republic of Rights: Copyright 2002 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Physics and materials science ; Physics of condensed state: structure, mechanical and thermal properties

Klicken Sie ein Format an und speichern Sie dann die Daten oder geben Sie eine Empfänger-Adresse ein und lassen Sie sich per Email zusenden.

BibTeX Citavi, JabRef, u.a.
(Literaturverwaltung)

PDF kein Volltext!
(Merkzettel, Notizen)

RIS Endnote, Citavi u.a.
(Literaturverwaltung)

MODS
(XML zur Weiterverarbeitung)

oder

Wählen Sie das für Sie passende Zitationsformat und kopieren Sie es dann in die Zwischenablage, lassen es sich per Mail zusenden oder speichern es als PDF-Datei.

Gewünschter Zitations-Stil:

oder

Bitte prüfen Sie, ob die Zitation formal korrekt ist, bevor Sie sie in einer Arbeit verwenden. Benutzen Sie gegebenenfalls den "Exportieren"-Dialog, wenn Sie ein Literaturverwaltungsprogramm verwenden und die Zitat-Angaben selbst formatieren wollen.