Optical properties of rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry

MISTRIK, Jan ; YAMAGUCHI, Tomuo ; et al.

In: ICSFS-12: 12th International Conference on Solid Films and Surfaces, Hamamatsu, Japan, 21-25 June 2004Applied surface science 244(1-4):431-434; Jg. 244 (2005) 1-4, S. 431-434

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Optical characterization of sol-gel deposited lanthanum nickel oxide, LaNiO3(LNO) film on Pt-coated Si substrate was performed by spectroscopic ellipsometry and reflectometry. The sum of five Lorentz oscillators was used for LNO dispersion parameterization in spectral range from 190 to 1000 nm. Two theoretical approaches: Raileigh-Rice theory (RRT) and effective medium approximation (EMA) were considered to account for the effect of LNO upper boundary roughness. Root mean square (rms) values of the heights of irregularities obtained by atomic force microscopy (AFM) and RRT were 2.09 and 5.62 nm, respectively. Effective layer thickness in EMA approach was found to be 4.62 nm. Higher values of roughness determined from optical methods with respect to the AFM may be assigned to the effect of convolution of AFM tip and boundary irregularities.

Titel:	Optical properties of rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry
Autor/in / Beteiligte Person:	MISTRIK, Jan ; YAMAGUCHI, Tomuo ; FRANTA, Daniel ; OHLIDAL, Ivan ; GU JIN, HU ; NING, DAI
Link:	E-Journal im Bestand der UB Hagen? View record from PASCAL Archive
Quelle:	ICSFS-12: 12th International Conference on Solid Films and Surfaces, Hamamatsu, Japan, 21-25 June 2004Applied surface science 244(1-4):431-434; Jg. 244 (2005) 1-4, S. 431-434
Veröffentlichung:	Amsterdam: Elsevier Science, 2005
Medientyp:	Konferenz
Umfang:	print, 9 ref
ISSN:	0169-4332 (print)
Schlagwort:	General chemistry, physical chemistry Chimie générale, chimie physique Crystallography Cristallographie cristallogenèse Nanotechnologies, nanostructures, nanoobjects Nanotechnologies, nanostructures, nanoobjets Condensed state physics Physique de l'état condensé Sciences exactes et technologie Exact sciences and technology Physique Physics Etat condense: structure electronique, proprietes electriques, magnetiques et optiques Condensed matter: electronic structure, electrical, magnetic, and optical properties Propriétés optiques, spectroscopie et autres interactions de la matière condensée avec les particules et le rayonnement Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Propriétés optiques des matériaux massifs et des couches minces Optical properties of bulk materials and thin films Constantes optiques: indice de réfraction; constante diélectrique complexe; coefficients d'absorption, de réflexion et de transmission; émissivité Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity) Composé minéral Inorganic compounds Lanthane composé Lanthanum compounds Métal transition composé Transition element compounds Composé ternaire Ternary compounds Constante optique Optical constants Couche mince Thin films Ellipsométrie Ellipsometry Lanthane oxyde Lanthanum oxides Nickel oxyde Nickel oxides Procédé sol gel Sol-gel process Réflectométrie Reflectometry La Ni O LaNiO3 78.20.Ci Ellipsometry LNO
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Conference Paper File Description: text Language: English Author Affiliations: Research Institute of Electronics, Shizuoka University, Johoku 3-5-1, 432-8011 Hamamatsu, Japan ; Laboratory of Plasma Physics and Plasma Sources, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic ; Shanghai Institute of Technical Physics, National Laboratory for Infrared Physics, Chinese Academy of Sciences, Shanghai 200083, China Rights: Copyright 2005 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Physics of condensed state: electronic structure, electrical, magnetic and optical properties

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