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Cr1.8Ti0.2O3-δ (CTO) powders were prepared by citrate, sol-gel and solid-state routes, respectively. The effect of preparation methods on the morphology of sputtered thin films was further investigated. X-ray diffraction patterns of the powders and films confirmed a single phase CTO. No impurity was observed even after sintering the powders at 1000 °C for 24 h. X-ray photoelectron spectroscopy analysis showed that Cr 2p (577.8 eV), and O 1 s (531.5 eV) core levels of the sputtered films have ∼1 eV variation in their binding energy positions compared to those of CTO powders. The atomic force microscopy analysis showed the grains of the films obtained by sputtering sol-gel powders had the smallest size in the range of 7-58 nm. The surface roughness of the thin films had the lowest value at 0.70 nm, whereas those obtained from solid state solution had the maximum value of 2.51 nm.

Titel:	Investigation and characterization of radio frequency sputtered Cr1.8Ti0.2O3-δ thin films derived by citrate, sol-gel and solid state routes
Autor/in / Beteiligte Person:	POKHREL, Suman ; XINGLIN, LI ; LIHUA, HUO ; HUI, ZHAO ; XIAOLI, CHENG
Link:	E-Journal im Bestand der UB Hagen? View record from PASCAL Archive
Zeitschrift:	Thin solid films, Jg. 515 (2007), Heft 18, S. 7053-7058
Veröffentlichung:	Lausanne: Elsevier Science, 2007
Medientyp:	academicJournal
Umfang:	print, 15 ref
ISSN:	0040-6090 (print)
Schlagwort:	Crystallography Cristallographie cristallogenèse Electronics Electronique Metallurgy, welding Métallurgie, soudage Condensed state physics Physique de l'état condensé Sciences exactes et technologie Exact sciences and technology Physique Physics Etat condense: structure, proprietes mecaniques et thermiques Condensed matter: structure, mechanical and thermal properties Structure des liquides et des solides; cristallographie Structure of solids and liquids; crystallography Diffraction et diffusion de rayons x X-ray diffraction and scattering Diffraction sur monocristal et sur poudre Single-crystal and powder diffraction Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques) Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Structure et morphologie de couches minces Thin film structure and morphology Structure et morphologie; épaisseur Structure and morphology; thickness Chrome oxyde Chromium oxides Couche mince Thin films Diagramme poudre Powder pattern Diagrama polvo Diffraction RX XRD Dopage Doping Energie liaison Binding energy Etat solide Solid state Estado sólido Frittage Sintering Microscopie force atomique Atomic force microscopy Microstructure Métal transition Transition elements Niveau coeur Core levels Procédé sol gel Sol-gel process Pulvérisation haute fréquence Radiofrequency sputtering Pulverización alta frecuencia Rugosité Roughness Solution solide Solid solutions Spectre photoélectron RX X-ray photoelectron spectra Titane Titanium 6110N 6855J Ti Chromium oxide Cr1.8Ti0.2Ο3-δ Sputtered films Sputtering Titanium doped X-ray diffraction
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Article File Description: text Language: English Author Affiliations: Laboratory of Functional Materials, School of Chemistry and Materials Science, Heilongjiang University, 150080, Harbin, China ; Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, 130022, Changchun, China Rights: Copyright 2007 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Physics of condensed state: structure, mechanical and thermal properties

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Investigation and characterization of radio frequency sputtered Cr1.8Ti0.2O3-δ thin films derived by citrate, sol-gel and solid state routes