Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever
In: Proceedings of the 32nd International Conference on Micro- and Nano-Engineering, Barcelona, 17-20 September 2006Microelectronic engineering 84(5-8):1374-1378; Jg. 84 (2007) 5-8, S. 1374-1378
Konferenz
- print, 5 ref
Zugriff:
The design, implementation and test of a monolithically integrated CMOS-mechanical resonator based on a metal cantilever are presented. Several resonant modes including fundamental and first higher mode have been electrically characterized with the embedded CMOS circuitry. Test results provide measures of both lateral and vertical modes of vibration of the metal cantilever. The experimental resonant modes found have been corroborated by finite element method (FEM) simulations.
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Electrical detection of multiple resonant modes in a CMOS-MEMS cantilever
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Autor/in / Beteiligte Person: | URANGA, A ; VERD, J ; TORRES, F ; TEVA, J ; LOPEZ, J. L ; ABADAL, G ; ESTEVE, J ; PEREZ-MURANO, F ; BARNIOL, N |
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Quelle: | Proceedings of the 32nd International Conference on Micro- and Nano-Engineering, Barcelona, 17-20 September 2006Microelectronic engineering 84(5-8):1374-1378; Jg. 84 (2007) 5-8, S. 1374-1378 |
Veröffentlichung: | Amsterdam: Elsevier Science, 2007 |
Medientyp: | Konferenz |
Umfang: | print, 5 ref |
ISSN: | 0167-9317 (print) |
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