Effects of buffer layers on the orientation and dielectric properties of Ba(Zr0.20Ti0.80)O3 thin films prepared by sol-gel method
In: Journal of crystal growth, Jg. 310 (2008), Heft 6, S. 1245-1249
academicJournal
- print, 36 ref
Zugriff:
Ba(Zr0.20Ti0.80)O3 (BZT) thin films were deposited on Pt(111)/Ti/SiO2/Si(100), LaNiO3 (LNO) and CeO2-buffered Pt(111)/Ti/SiO2/ Si(100) substrates by sol-gel process. The BZT thin films directly grown on Pt(111)/Ti/SiO2/Si(100) substrates exhibited highly (111) preferred orientation, while the films deposited on Pt(111)/Ti/SiO2/Si(100) substrates with LNO and CeO2 buffer layers showed, respectively, highly (100) and (1 1 0) preferred orientation. At 1 MHz, the dielectric constants were 416, 465 and 245 for the BZT thin films grown on Pt(111)/Ti/SiO2/Si(100), LNO and CeO2-buffered Pt(111)/Ti/SiO2/Si(100) substrates, respectively. The difference in dielectric properties of these three kinds of BZT films may be attributed to the different grain sizes and various orientations.
Titel: |
Effects of buffer layers on the orientation and dielectric properties of Ba(Zr0.20Ti0.80)O3 thin films prepared by sol-gel method
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Autor/in / Beteiligte Person: | GAO, L. N ; SONG, S. N ; ZHAI, J. W ; YAO, X ; XU, Z. K |
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Zeitschrift: | Journal of crystal growth, Jg. 310 (2008), Heft 6, S. 1245-1249 |
Veröffentlichung: | Amsterdam: Elsevier, 2008 |
Medientyp: | academicJournal |
Umfang: | print, 36 ref |
ISSN: | 0022-0248 (print) |
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