Improved dielectric and electrical properties of (Ba,Sr)TiO3 thin films using Pt/LaNiO3 as the top-electrode material
In: Applied physics. A, Materials science & processing (Print), Jg. 91 (2008), Heft 3, S. 541-544
Online
academicJournal
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Zugriff:
(LNO) bottom electrode, with Pt (80 nm), LNO (100 nm), and double-layer Pt/LNO (80/10 nm) top electrodes have been investigated. It was found that the dielectric behavior is improved by a decrease of the electrical properties for the BST capacitor using double-layer Pt/LNO top electrodes. The dielectric constant of 100nm-thick BST films with a Pt electrode was only 165 at 100 kHz, while that with a double-layer electrode was about 242. Correspondingly, the tunability was greatly improved from 26% to 41% with an electric field of 600 kV/cm. These have been attributed to increased interfacial capacitance density, which resulted from an improved interface, between the films and the top electrode. The dielectric loss was also reduced by using a double-layer electrode. Furthermore, the leakage current of a capacitor with a double-layer Pt/LNO electrode was one order of magnitude lower than that with a single LNO electrode. It can be explained by the fact that the weak chemical interaction between LNO (10 nm) and BST causes a high potential barrier at the interface.
Titel: |
Improved dielectric and electrical properties of (Ba,Sr)TiO3 thin films using Pt/LaNiO3 as the top-electrode material
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Autor/in / Beteiligte Person: | GAO, Y. H ; SUN, J. L ; MA, J. H ; MENG, X. J ; CHU, J. H |
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Zeitschrift: | Applied physics. A, Materials science & processing (Print), Jg. 91 (2008), Heft 3, S. 541-544 |
Veröffentlichung: | Berlin: Springer, 2008 |
Medientyp: | academicJournal |
Umfang: | print, 22 ref |
ISSN: | 0947-8396 (print) |
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