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This paper presents the fabrication and characterization of implantable and flexible nerve cuff electrodes for neural interfaces using the conventional BioMEMS technique. In order to fabricate a flexible nerve electrode, polyimide (PI) was chosen as the substrate material. Then, nerve electrodes were thermally re-formed in a cuff shape so as to increase the area in which the charges were transferred to the nerve. Platinum (Pt), iridium (Ir) and iridium oxide (IrOx) films, which were to serve as conducting materials for the nerve electrodes, were deposited at different working pressures by RF magnetron sputtering. The electrochemical properties of the deposited films were characterized by electrochemical impedance spectroscopy (EIS). The charge delivery capacities of the films were recorded and calculated by cyclic voltammetry (CV). The deposited films of Pt, Ir and IrO, have strong differences in electrochemical properties, which depend on the working pressure of sputter. Each film deposited at 30 mTorr of working pressure shows the highest value of charge delivery capacity (CDC). For the IrOx films, the electrochemical properties were strongly affected by the working pressure as well as the Ar:O2 gas ratio. The IrOx film deposited with an Ar:O2 gas ratio of 8:1 showed the highest CDC of 59.5 mC cm-2, which was about five times higher than that of films deposited with a 1:1 gas ratio.

Titel:	Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir and IrOx films deposited by RF sputtering
Autor/in / Beteiligte Person:	SOO HYUN, LEE ; JUNG HWAN, JUNG ; YOUN MEE, CHAE ; SUH, Jun-Kyo Francis ; JI YOON, KANG
Link:	Full Text Finder (Volltext) E-Journal im Bestand der UB Hagen? View record from PASCAL Archive
Zeitschrift:	Journal of micromechanics and microengineering (Print), Jg. 20 (2010), Heft 3
Veröffentlichung:	Bristol: Institute of Physics, 2010
Medientyp:	academicJournal
Umfang:	print, 25 ref
ISSN:	0960-1317 (print)
Schlagwort:	Electronics Electronique Mechanical engineering Génie mécanique Sciences exactes et technologie Exact sciences and technology Physique Physics Generalites General Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie Instruments, apparatus, components and techniques common to several branches of physics and astronomy Techniques, équipements et instruments mécaniques Mechanical instruments, equipment and techniques Systèmes et dispositifs micromécaniques Micromechanical devices and systems Sciences appliquees Applied sciences Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Fabrication microélectronique (technologie des matériaux et des surfaces) Microelectronic fabrication (materials and surfaces technology) Genie mecanique. Construction mecanique Mechanical engineering. Machine design Mécanique de précision. Horlogerie Precision engineering, watch making Sciences biologiques et medicales Biological and medical sciences Sciences biologiques fondamentales et appliquees. Psychologie Fundamental and applied biological sciences. Psychology Biotechnologie Biotechnology Méthodes. Procédés. Technologies Methods. Procedures. Technologies Méthodes et appareillages divers Various methods and equipments Biodétecteurs. Biocapteurs Biosensors Analyse régression Regression analysis Análisis regresión Biotecnología Conduction électrique Electrical conduction Conductor eléctrico Couche oxyde Oxide layer Capa óxido Dispositif microélectromécanique Microelectromechanical device Dispositivo microelectromecánico Electrode Electrodes Electrodo Génie biomédical Biomedical engineering Ingeniería biomédica Imide polymère Polyimide Imida polímero Interface solide solide Solid solid interface Interfase sólido sólido Mesure électrique Electrical measurement Medida eléctrica Modèle autorégressif Autoregressive model Modelo autorregresivo Méthode électrochimique Electrochemical method Método electroquímico Platine Platinum Platino Processus fabrication Production process Proceso fabricación Propriété électrochimique Electrochemical properties Propiedad electroquímica Pulvérisation cathodique Cathodic sputtering Pulverización catódica Pulvérisation haute fréquence Radiofrequency sputtering Pulverización alta frecuencia
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Article File Description: text Language: English Author Affiliations: NanoBio Research Center, Korea Institute of Science and Technology, Seoul 136-791, Korea, Republic of ; Convergence Technology Laboratories, Korea Institute of Science and Technology, Seoul 136-791, Korea, Republic of Rights: Copyright 2015 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Biotechnology ; Electronics ; Mechanical engineering. Mechanical construction. Handling ; Metrology

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Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir and IrOx films deposited by RF sputtering