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In this paper, a new compact broadband uniplanar 180° phase switch, based on an air-bridged coplanar-waveguide (CPW) cross loaded with two capacitive-contact microelectromechancial systems (MEMS) switches in opposed (ON/OFF) states, is presented. The two phase-switch states (0°/180°) are defined by actuating the MEMS switches from ON/OFF to OFF/ON. The asymmetry in the states of the MEMS switches results in a complex multimodal interaction between the two fundamental even and odd CPW modes at the air-bridged cross. Using the multimodal theory, the phase switch is analyzed, its frequency-independent 180°-phase-shift properties are proven, and a set of design equations for perfect port matching are derived. A multimodal circuit model for the phase switch is then presented, and design equations and conditions for compact phase switches are derived. Finally, a very compact phase switch is designed and fabricated using an eight-mask surface micromachining process, featuring a measured phase shift of 180° ± 1.8° in a very wide frequency range (1―30 GHz) and an insertion loss better than 2.1 dB in the design band (10―20 GHz). Experimental results are in very good agreement with electromagnetic and multimodal circuit simulations, thus validating the proposed approach and design procedure.

Titel:	RF-MEMS Uniplanar 180° Phase Switch Based on a Multimodal Air-Bridged CPW Cross
Autor/in / Beteiligte Person:	LLAMAS, Marco Antonio ; GIRBAU, David ; RIBO, Miquel ; PRADELL, Lluis ; GIACOMOZZI, Flavio ; COLPO, Sabrina
Link:	Volltext View record from PASCAL Archive
Zeitschrift:	IEEE transactions on microwave theory and techniques, Jg. 59 (2011), Heft 7, S. 1769-1777
Veröffentlichung:	New York, NY: Institute of Electrical and Electronics Engineers, 2011
Medientyp:	academicJournal
Umfang:	print, 17 ref
ISSN:	0018-9480 (print)
Schlagwort:	Electronics Electronique Optics Optique Telecommunications Télécommunications Sciences exactes et technologie Exact sciences and technology Sciences appliquees Applied sciences Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Fabrication microélectronique (technologie des matériaux et des surfaces) Microelectronic fabrication (materials and surfaces technology) Dispositifs micro- et nanoélectromécaniques (mems/nems) Micro- and nanoelectromechanical devices (mems/nems) Circuits électriques, optiques et optoélectroniques Electric, optical and optoelectronic circuits Propriétés des circuits Circuit properties Circuits électroniques Electronic circuits Circuits de commutation, de multiplexage, à capacités commutées Switching, multiplexing, switched capacity circuits Circuits hyperfréquences, circuits intégrés hyperfréquences, lignes de transmission hyperfréquences, circuits à ondes submillimétriques Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Asymétrie Asymmetry Asimetría Commutateur Selector switch Conmutador Conception compacte Compact design Concepción compacta Dispositif microélectromécanique Microelectromechanical device Dispositivo microelectromecánico Déphasage Phase shift Defasaje Effet on off On off effect Efecto on off Electromagnétisme Electromagnetism Electromagnetismo Fabrication microélectronique Microelectronic fabrication Fabricación microeléctrica Guide onde coplanaire Coplanar waveguides Large bande Wide band Banda ancha Ligne fente Slot line Línea rendija Microusinage Micromachining Micromaquinado Perte insertion Insertion loss Pérdida inserción Simulation circuit Circuit simulation Technologie planaire Planar technology Tecnología planar 0°/180° phase switch Air-bridged coplanar waveguide (CPW) cross coplanar-to-slotline transitions microelectromechanical systems (MEMS) switch multimodal models uniplanar circuit
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Article File Description: text Language: English Author Affiliations: Baolab Microsystems, 08220 Terrassa, Spain ; Automatics, Electronics and Electrical Department, Universitat Rovira i Virgili, 43007 Tarragona, Spain ; Department of Electronics and Telecommunications, La Salle-Universitat Ramon Llull, 08022 Barcelona, Spain ; Department of Signal Theory and Communications, Universitat Politècnica de Catalunya, 08034 Barcelona, Spain ; Fondazione Bruno Kessler (FBK), 38123 Povo Trento, Italy Rights: Copyright 2015 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Electronics

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RF-MEMS Uniplanar 180° Phase Switch Based on a Multimodal Air-Bridged CPW Cross