Effects of LaNiO3 conductive buffer layer on the structural and electrical characteristics of Ba0.4Sr0.6TiO3 thin films prepared by RF magnetron sputtering

WU, C.-M ; WU, T.-B

In: Japanese journal of applied physics, Jg. 36 (1997), Heft 3A, S. 1164-1168

academicJournal - print, 17 ref 1

Sputter-deposited LaNiO3 (LNO) was used as a conductive buffer layer for the deposition of 80-nm-thick Ba0.4Sr0.6TiO3 (BST) thin films on Pt/Ti/SiO2/Si substrates by rf magnetron sputtering. Smooth and highly (100)-oriented perovskite films of BST were grown on the (100)-textured LNO by deposition at temperatures ≥200°C. However, a relatively rough and weakly crystallized BST film was obtained by deposition directly on Pt/Ti/SiO2/Si substrates at 500°C. Satisfactory dielectric constants of 160 to 320 were achieved for films deposited on LNO at temperatures from 350 to 550°C, while a low dielectric constant of 120 was obtained for the film deposited on Pt at 500°C. All the films in a Pt/BST/LNO or Pt/BST/Pt capacitor configuration basically showed a similar ohmic conduction characteristic of low conductivity, in low bias regime up to a transition voltage around 1-3V, and beyond that a nonohmic conduction with current rapidly increasing against the applied bias occurred. However, the films deposited on LNO would have a more moderate nonohmic conduction than that of the film deposited on Pt.

Titel:	Effects of LaNiO3 conductive buffer layer on the structural and electrical characteristics of Ba0.4Sr0.6TiO3 thin films prepared by RF magnetron sputtering
Autor/in / Beteiligte Person:	WU, C.-M ; WU, T.-B
Link:	View record from PASCAL Archive
Zeitschrift:	Japanese journal of applied physics, Jg. 36 (1997), Heft 3A, S. 1164-1168
Veröffentlichung:	Tokyo: Japanese journal of applied physics, 1997
Medientyp:	academicJournal
Umfang:	print, 17 ref 1
ISSN:	0021-4922 (print)
Schlagwort:	Crystallography Cristallographie cristallogenèse Optics Optique Condensed state physics Physique de l'état condensé Physics Physique Plasma physics Physique des plasmas Sciences exactes et technologie Exact sciences and technology Etat condense: structure electronique, proprietes electriques, magnetiques et optiques Condensed matter: electronic structure, electrical, magnetic, and optical properties Propriétés et matériaux diélectriques, piézoélectriques et ferroélectriques Dielectrics, piezoelectrics, and ferroelectrics and their properties Couches minces diélectriques Dielectric thin films Domaines interdisciplinaires: science des materiaux; rheologie Cross-disciplinary physics: materials science; rheology Science des matériaux Materials science Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie Methods of deposition of films and coatings; film growth and epitaxy Depôt par pulvérisation cathodique Deposition by sputtering Composé minéral Inorganic compounds Lanthanide composé Rare earth compounds Métal transition composé Transition element compounds Baryum titanate Barium titanates Composé quaternaire Quaternary compounds Composé ternaire Ternary compounds Conductivité électrique Electric conductivity Constante diélectrique Permittivity Couche mince Thin films Couche tampon Buffer layer Capa tampón Etude expérimentale Experimental study Lanthane oxyde Lanthanum oxides Nickel oxyde Nickel oxides Pulvérisation cathodique Cathode sputtering Strontium titanate Strontium titanates Structure cristalline Crystal structure Ba O Sr Ti Ba0,4Sr0,6TiO3 La Ni O LaNiO3
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Article File Description: text Language: English Author Affiliations: Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Tawain, Province of China Rights: Copyright 1997 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Physics and materials science ; Physics of condensed state: electronic structure, electrical, magnetic and optical properties

Klicken Sie ein Format an und speichern Sie dann die Daten oder geben Sie eine Empfänger-Adresse ein und lassen Sie sich per Email zusenden.

BibTeX Citavi, JabRef, u.a.
(Literaturverwaltung)

PDF kein Volltext!
(Merkzettel, Notizen)

RIS Endnote, Citavi u.a.
(Literaturverwaltung)

MODS
(XML zur Weiterverarbeitung)

oder

Wählen Sie das für Sie passende Zitationsformat und kopieren Sie es dann in die Zwischenablage, lassen es sich per Mail zusenden oder speichern es als PDF-Datei.

Gewünschter Zitations-Stil:

oder

Bitte prüfen Sie, ob die Zitation formal korrekt ist, bevor Sie sie in einer Arbeit verwenden. Benutzen Sie gegebenenfalls den "Exportieren"-Dialog, wenn Sie ein Literaturverwaltungsprogramm verwenden und die Zitat-Angaben selbst formatieren wollen.