Scaleable stagnation-flow reactors for uniform materials deposition : application to combustion synthesis of diamond
In: Applied physics letters, Jg. 63 (1993), Heft 11, S. 1498-1500
Online
academicJournal
- print, 14 ref
Zugriff:
We describe two inherently scaleable geometries for chemical-vapor-deposition and heat-transfer processes that are based on stagnation flows. The «coflow» and «trumpet-bell» designs result in radially uniform fluxes to surfaces and they optimize the use of reagents. Using a trumpet-bell burner, we have grown uniform films of diamond from a substrate-stabilized flat flame of C2H2/H2/O2.
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Scaleable stagnation-flow reactors for uniform materials deposition : application to combustion synthesis of diamond
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Autor/in / Beteiligte Person: | MCCARTHY, K. F ; MEEKS, E ; KEE, R. J ; LUTZ, A. E |
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Zeitschrift: | Applied physics letters, Jg. 63 (1993), Heft 11, S. 1498-1500 |
Veröffentlichung: | Melville, NY: American Institute of Physics, 1993 |
Medientyp: | academicJournal |
Umfang: | print, 14 ref |
ISSN: | 0003-6951 (print) |
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