Study of electrical and optical properties of CNx thin films deposited by reactive magnetron sputtering.
In: Microelectron. Reliab., Jg. 51 (2011), Heft 7, S. 1207-1212
academicJournal
Zugriff:
Titel: |
Study of electrical and optical properties of CNx thin films deposited by reactive magnetron sputtering.
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Autor/in / Beteiligte Person: | Prociów, E. L. ; Chodzinski, T. |
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Zeitschrift: | Microelectron. Reliab., Jg. 51 (2011), Heft 7, S. 1207-1212 |
Veröffentlichung: | 2011 |
Medientyp: | academicJournal |
DOI: | 10.1016/j.microrel.2011.03.031 |
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