Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36°-Cut Lithium Niobate
In: Journal of Microelectromechanical Systems, Jg. 32 (2023-06-01), Heft 3, S. 279-289
Online
academicJournal
Zugriff:
Titel: |
Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36°-Cut Lithium Niobate
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Autor/in / Beteiligte Person: | Stettler, S. ; Villanueva, L.G. |
Link: | |
Zeitschrift: | Journal of Microelectromechanical Systems, Jg. 32 (2023-06-01), Heft 3, S. 279-289 |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 1057-7157 (print) ; 1941-0158 (print) |
DOI: | 10.1109/JMEMS.2023.3262021 |
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