Carbon Nanotube Growth on the Polysilicon Layers of CMOS
In: IEEE 23rd International Conference on Nanotechnology (NANO); (2023-07-02) S. 411-414
Konferenz
Zugriff:
Titel: |
Carbon Nanotube Growth on the Polysilicon Layers of CMOS
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Autor/in / Beteiligte Person: | Roy, Avisek ; Aasmundtveit, Knut E. |
Quelle: | IEEE 23rd International Conference on Nanotechnology (NANO); (2023-07-02) S. 411-414 |
Veröffentlichung: | 2023 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-3346-6 (print) |
ISSN: | 1944-9380 (print) |
DOI: | 10.1109/NANO58406.2023.10231182 |
Sonstiges: |
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